Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10747125 | Support apparatus, lithographic apparatus and device manufacturing method | Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot, Christiaan Alexander Hoogendam +6 more | 2020-08-18 |
| 10747127 | Lithographic apparatus | Frits Van Der Meulen, Erik Johan Arlemark, Hendrikus Herman Marie Cox, Martinus Agnes Willem Cuijpers, Joost DE HOOGH +17 more | 2020-08-18 |
| 10712678 | Imprint lithography apparatus and method | Yvonne Wendela Kruijt-Stegeman, Andre Bernardus Jeunink, Arie Jeffrey Den Boef, Vadim Yevgenyevich Banine, Michael Jozef Mathijs Renkens +5 more | 2020-07-14 |