Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10747125 | Support apparatus, lithographic apparatus and device manufacturing method | Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Christiaan Alexander Hoogendam +6 more | 2020-08-18 |
| 10684558 | Motor assembly, lithographic apparatus and device manufacturing method | Pim Jozef Hendrik Duijsens | 2020-06-16 |