Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10750604 | Droplet generator for lithographic apparatus, EUV source and lithographic apparatus | Wilhelmus Henricus Theodorus Maria Aangenent, Ronald Johannes Hultermans, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Peter van Putten | 2020-08-18 |
| 10712678 | Imprint lithography apparatus and method | Yvonne Wendela Kruijt-Stegeman, Andre Bernardus Jeunink, Arie Jeffrey Den Boef, Vadim Yevgenyevich Banine, Michael Jozef Mathijs Renkens +5 more | 2020-07-14 |
| 10654217 | Imprint lithography | Yvonne Wendela Kruijt-Stegeman, Raymond Jacobus Wilhelmus Knaapen, Sander Frederik Wuister, Ivar Schram, Raymond Wilhelmus Louis Lafarre | 2020-05-19 |
| 10538859 | Methods for providing patterned orientation templates for self-assemblable polymers for use in device lithography | Emiel Peeters, Wilhelmus Sebastianus Marcus Maria Ketelaars, Sander Frederik Wuister, Roelof Koole, Christianus Martinus Van Heesch | 2020-01-21 |