Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10874012 | Biosafety cabinet and clean air device | Hirotoshi Sato | 2020-12-22 |
| 10830462 | Clean air device | Hirotoshi Sato | 2020-11-10 |
| 10649346 | Substrate table, a lithographic apparatus and a method for manufacturing a device using a lithographic apparatus | Joost Jeroen Ottens, Raymond Wilhelmus Louis Lafarre | 2020-05-12 |
| 10591828 | Lithographic apparatus and method | Thibault Simon Mathieu Laurent, Gerardus Adrianus Antonius Maria Kusters, Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Wilhelmus Louis Lafarre, Koen Steffens +5 more | 2020-03-17 |