Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10871714 | Lithographic apparatus, cover for use in a lithographic apparatus and method for designing a cover for use in a lithographic apparatus | Nicolaas Ten Kate, Sergei Shulepov, Raymond Wilhelmus Louis Lafarre | 2020-12-22 |
| 10705426 | Extraction body for lithographic apparatus | Gijs Kramer, Martijn Houben, Nicholas Peter Waterson, Thibault Simon Mathieu Laurent, Yuri Johannes Gabriël Van De Vijver +6 more | 2020-07-07 |
| 10578959 | Support apparatus, lithographic apparatus and device manufacturing method | Gijs Kramer, Simon Karel RAVENSBERGEN, Pieter Renaat Maria Hennus | 2020-03-03 |