Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10705426 | Extraction body for lithographic apparatus | Martijn Houben, Nicholas Peter Waterson, Thibault Simon Mathieu Laurent, Yuri Johannes Gabriël Van De Vijver, Marcus Martinus Petrus Adrianus Vermeulen +6 more | 2020-07-07 |
| 10578959 | Support apparatus, lithographic apparatus and device manufacturing method | Simon Karel RAVENSBERGEN, Niek Jacobus Johannes Roset, Pieter Renaat Maria Hennus | 2020-03-03 |