Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10705426 | Extraction body for lithographic apparatus | Gijs Kramer, Martijn Houben, Nicholas Peter Waterson, Thibault Simon Mathieu Laurent, Marcus Martinus Petrus Adrianus Vermeulen +6 more | 2020-07-07 |
| 10571810 | Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus | Daan Daniel Johannes Antonius Van Sommeren, Coen Hubertus Matheus Baltis, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Johannes Cornelius Paulus Melman +6 more | 2020-02-25 |
| 10534270 | Lithography apparatus, a method of manufacturing a device and a control program | Norbertus Josephus Martinus Van Den Nieuwelaar, Victor Manuel Blanco Carballo, Casper Roderik De Groot, Rolf Hendrikus Jacobus Custers, David M. Phillips +7 more | 2020-01-14 |