Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10705426 | Extraction body for lithographic apparatus | Gijs Kramer, Martijn Houben, Nicholas Peter Waterson, Thibault Simon Mathieu Laurent, Yuri Johannes Gabriël Van De Vijver +6 more | 2020-07-07 |
| 10571810 | Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus | Daan Daniel Johannes Antonius Van Sommeren, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Johannes Cornelius Paulus Melman, Günes NAKIBOGLU +6 more | 2020-02-25 |