Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10571810 | Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus | Daan Daniel Johannes Antonius Van Sommeren, Coen Hubertus Matheus Baltis, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Günes NAKIBOGLU +6 more | 2020-02-25 |