Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10838310 | Lithographic apparatus and device manufacturing method involving a heater | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more | 2020-11-17 |
| 10712675 | Immersion liquid, exposure apparatus, and exposure process | Hans Jansen, Marco Koert Stavenga, Franciscus Johannes Joseph Janssen, Anthonie Kuijper | 2020-07-14 |
| 10620546 | Lithographic apparatus and device manufacturing method involving a liquid confinement structure | Hans Jansen, Marco Koert Stavenga | 2020-04-14 |