Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10732511 | Projection system and mirror and radiation source for a lithographic apparatus | Marcus Adrianus Van De Kerkhof, Anton Bernhard Van Oosten, Hans Butler, Erik Roelof Loopstra, Koen Jacobus Johannes Maria Zaal | 2020-08-04 |
| 10649347 | Lithographic apparatus and device manufacturing method | Michaël Johannes Christiaan RONDE, Lucas KUINDERSMA, Niels Johannes Maria Bosch, Hans Butler, Cornelius Adrianus Lambertus De Hoon +2 more | 2020-05-12 |
| 10551751 | Lithography apparatus and device manufacturing method | Hans Butler | 2020-02-04 |