Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10761433 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens | 2020-09-01 |
| 10732511 | Projection system and mirror and radiation source for a lithographic apparatus | Marcus Adrianus Van De Kerkhof, Anton Bernhard Van Oosten, Hans Butler, Erik Roelof Loopstra, Marc Wilhelmus Maria Van Der Wijst | 2020-08-04 |