Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10816910 | Vibration isolator, lithographic apparatus and device manufacturing method | Hans Butler, Fransiscus Mathijs Jacobs, Pavel Kagan, Jeroen Pieter Starreveld, Maurice Willem Jozef Etiënne Wijckmans | 2020-10-27 |
| 10649347 | Lithographic apparatus and device manufacturing method | Michaël Johannes Christiaan RONDE, Lucas KUINDERSMA, Niels Johannes Maria Bosch, Hans Butler, Marc Wilhelmus Maria Van Der Wijst +2 more | 2020-05-12 |
| 10578983 | Lithographic apparatus having an active base frame support | Hans Butler, Björn Hubertus Maria Bukkems, Maurice Willem Jozef Etiënne Wijckmans | 2020-03-03 |