Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866529 | Lithographic apparatus and device manufacturing method | Hans Butler, Michael Johannes Vervoordeldonk | 2020-12-15 |
| 10838312 | Lithographic apparatus, lithographic projection apparatus and device manufacturing method | Jeroen Pieter Starreveld | 2020-11-17 |
| 10816910 | Vibration isolator, lithographic apparatus and device manufacturing method | Hans Butler, Cornelius Adrianus Lambertus De Hoon, Fransiscus Mathijs Jacobs, Pavel Kagan, Jeroen Pieter Starreveld | 2020-10-27 |
| 10578983 | Lithographic apparatus having an active base frame support | Hans Butler, Björn Hubertus Maria Bukkems, Cornelius Adrianus Lambertus De Hoon | 2020-03-03 |