Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10838312 | Lithographic apparatus, lithographic projection apparatus and device manufacturing method | Maurice Willem Jozef Etiënne Wijckmans | 2020-11-17 |
| 10816910 | Vibration isolator, lithographic apparatus and device manufacturing method | Hans Butler, Cornelius Adrianus Lambertus De Hoon, Fransiscus Mathijs Jacobs, Pavel Kagan, Maurice Willem Jozef Etiënne Wijckmans | 2020-10-27 |