Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866529 | Lithographic apparatus and device manufacturing method | Hans Butler, Maurice Willem Jozef Etiënne Wijckmans | 2020-12-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866529 | Lithographic apparatus and device manufacturing method | Hans Butler, Maurice Willem Jozef Etiënne Wijckmans | 2020-12-15 |