Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811323 | Method and apparatus to determine a patterning process parameter | Adriaan Johan Van Leest, Anagnostis Tsiatmas, Elliott Gerard McNamara, Alok Verma, Thomas Theeuwes +5 more | 2020-10-20 |
| 10732514 | Metrology method and apparatus with increased bandwidth | Hugo Augustinus Joseph Cramer, Seyed Iman Mossavat | 2020-08-04 |
| 10615084 | Method and apparatus to determine a patterning process parameter, associated with a change in a physical configuration, using measured pixel optical characteristic values | Adriaan Johan Van Leest, Anagnostis Tsiatmas, Elliott Gerard McNamara, Alok Verma, Thomas Theeuwes +1 more | 2020-04-07 |
| 10571806 | Method and system to monitor a process apparatus | Wim Tjibbo Tel, Mark John Maslow, Frank Staals | 2020-02-25 |
| 10546790 | Method and apparatus to determine a patterning process parameter | Adriaan Johan Van Leest, Anagnostis Tsiatmas, Elliott Gerard McNamara, Alok Verma, Thomas Theeuwes +1 more | 2020-01-28 |