Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811323 | Method and apparatus to determine a patterning process parameter | Adriaan Johan Van Leest, Anagnostis Tsiatmas, Paul Christiaan Hinnen, Alok Verma, Thomas Theeuwes +5 more | 2020-10-20 |
| 10782617 | Method and apparatus to determine a patterning process parameter | Anagnostis Tsiatmas | 2020-09-22 |
| 10615084 | Method and apparatus to determine a patterning process parameter, associated with a change in a physical configuration, using measured pixel optical characteristic values | Adriaan Johan Van Leest, Anagnostis Tsiatmas, Paul Christiaan Hinnen, Alok Verma, Thomas Theeuwes +1 more | 2020-04-07 |
| 10546790 | Method and apparatus to determine a patterning process parameter | Adriaan Johan Van Leest, Anagnostis Tsiatmas, Paul Christiaan Hinnen, Alok Verma, Thomas Theeuwes +1 more | 2020-01-28 |