Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10871367 | Substrate, metrology apparatus and associated methods for a lithographic process | Hugo Augustinus Joseph Cramer, Thomas Theeuwes, Anagnostis Tsiatmas, Bert Verstraeten | 2020-12-22 |
| 10854189 | Techniques for model training for voice features | Jonathan B. Feinstein, Amina Shabbeer, Brandon Scott Durham, Catherine Breslin, Edward C. Bueche +6 more | 2020-12-01 |
| 10811323 | Method and apparatus to determine a patterning process parameter | Adriaan Johan Van Leest, Anagnostis Tsiatmas, Paul Christiaan Hinnen, Elliott Gerard McNamara, Thomas Theeuwes +5 more | 2020-10-20 |
| 10747122 | Method of measuring a parameter of a device manufacturing process, metrology apparatus, substrate, target, device manufacturing system, and device manufacturing method | Anagnostis Tsiatmas, Bert Verstraeten | 2020-08-18 |
| 10677589 | Substrate, metrology apparatus and associated methods for a lithographic process | Hugo Augustinus Joseph Cramer, Thomas Theeuwes, Anagnostis Tsiatmas, Bert Verstraeten | 2020-06-09 |
| 10615084 | Method and apparatus to determine a patterning process parameter, associated with a change in a physical configuration, using measured pixel optical characteristic values | Adriaan Johan Van Leest, Anagnostis Tsiatmas, Paul Christiaan Hinnen, Elliott Gerard McNamara, Thomas Theeuwes +1 more | 2020-04-07 |
| 10546790 | Method and apparatus to determine a patterning process parameter | Adriaan Johan Van Leest, Anagnostis Tsiatmas, Paul Christiaan Hinnen, Elliott Gerard McNamara, Thomas Theeuwes +1 more | 2020-01-28 |