Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10877381 | Methods of determining corrections for a patterning process | Weitian Kou, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer, Erik Johannes Maria Wallerbos +8 more | 2020-12-29 |
| 10642162 | Methods and apparatus for obtaining diagnostic information relating to an industrial process | Jasper Menger, David Deckers, David Han, Adrianus Cornelis Matheus Koopman, Irina Lyulina +3 more | 2020-05-05 |
| 10539882 | Methods and apparatus for obtaining diagnostic information, methods and apparatus for controlling an industrial process | Adrianus Cornelis Matheus Koopman, Scott Anderson Middlebrooks | 2020-01-21 |