Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10877381 | Methods of determining corrections for a patterning process | Weitian Kou, Alexander Ypma, Michiel Kupers, Lydia Marianna Vergaij-Huizer, Erik Johannes Maria Wallerbos +8 more | 2020-12-29 |
| 10613445 | Methods and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process | Dylan John David Davies, Paul Janssen, Naoko Tsugama, Richard Joseph Bruls, Kornelis Tijmen Hoekerd +5 more | 2020-04-07 |