Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10877381 | Methods of determining corrections for a patterning process | Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Erik Johannes Maria Wallerbos +8 more | 2020-12-29 |