Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859930 | Methods and apparatus for calculating substrate model parameters and controlling lithographic processing | Paul Cornelis Hubertus Aben, Everhardus Cornelis Mos | 2020-12-08 |
| 10642162 | Methods and apparatus for obtaining diagnostic information relating to an industrial process | Alexander Ypma, David Deckers, David Han, Adrianus Cornelis Matheus Koopman, Irina Lyulina +3 more | 2020-05-05 |