Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859923 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Murat Bozkurt, Maurits Van Der Schaar, Arie Jeffrey Den Boef | 2020-12-08 |
| 10705430 | Method of measuring a parameter of interest, inspection apparatus, lithographic system and device manufacturing method | Nicolas Mauricio Weiss, Jean-Pierre Agnes Henricus Marie Vaessen | 2020-07-07 |
| 10564552 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Murat Bozkurt, Maurits Van Der Schaar, Arie Jeffrey Den Boef | 2020-02-18 |