Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10753724 | Common-path integrated low coherence interferometry system and method therefor | Antonius van Leeuwen, Frank Coumans | 2020-08-25 |
| 10705430 | Method of measuring a parameter of interest, inspection apparatus, lithographic system and device manufacturing method | Gonzalo Roberto Sanguinetti, Jean-Pierre Agnes Henricus Marie Vaessen | 2020-07-07 |