Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10705430 | Method of measuring a parameter of interest, inspection apparatus, lithographic system and device manufacturing method | Gonzalo Roberto Sanguinetti, Nicolas Mauricio Weiss | 2020-07-07 |
| 10691030 | Measurement method, inspection apparatus, patterning device, lithographic system and device manufacturing method | Frank Staals, Eric Brouwer, Carlo Cornelius Maria Luijten | 2020-06-23 |