Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10691030 | Measurement method, inspection apparatus, patterning device, lithographic system and device manufacturing method | Frank Staals, Eric Brouwer, Jean-Pierre Agnes Henricus Marie Vaessen | 2020-06-23 |