Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10788765 | Method and apparatus for measuring a structure on a substrate | Alessandro Antoncecchi, Stephen EDWARD, Hao Zhang, Paulus Clemens Maria PLANKEN, Kjeld Sijbrand Eduard Eikema +3 more | 2020-09-29 |
| 10648919 | Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus | Gijsbert Simon Matthijs Jansen, Lars Christian Freisem, Kjeld Sijbrand Eduard Eikema, Simon Gijsbert Josephus Mathijssen | 2020-05-12 |