Issued Patents 2019
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10520832 | Topographic phase control for overlay measurement | Vladimir Levinski, Yuri Paskover, Yoni Shalibo | 2019-12-31 |
| 10458777 | Polarization measurements of metrology targets and corresponding target designs | Eran Amit, Barry Loevsky, Andrew V. Hill, Nuriel Amir, Vladimir Levinski +1 more | 2019-10-29 |
| 10444161 | Systems and methods for metrology with layer-specific illumination spectra | Daria Negri, Andrew V. Hill, Ohad Bachar, Vladimir Levinski, Yuri Paskover | 2019-10-15 |
| 10422508 | System and method for spectral tuning of broadband light sources | Andrew V. Hill, Ohad Bachar | 2019-09-24 |
| 10409171 | Overlay control with non-zero offset prediction | Michael Adel, William Pierson, Ady Levy, Pradeep Subrahmanyan, Liran Yerushalmi +4 more | 2019-09-10 |
| 10401228 | Simultaneous capturing of overlay signals from multiple targets | Andrew V. Hill, Yuri Paskover, Yuval Lubashevsky | 2019-09-03 |
| 10401738 | Overlay metrology using multiple parameter configurations | Andrew V. Hill, Andrei V. Shchegrov, Noam Sapiens | 2019-09-03 |
| 10371626 | System and method for generating multi-channel tunable illumination from a broadband source | Andrew V. Hill, Ohad Bachar | 2019-08-06 |
| 10261014 | Near field metrology | Noam Sapiens, Joel Seligson, Vladimir Levinski, Daniel Kandel, Yoel Feler +2 more | 2019-04-16 |
| 10242290 | Method, system, and user interface for metrology target characterization | Inna Tarshish-Shapir, Yoel Feler, Anat Marchelli, Berta Dinu, Vladimir Levinski +4 more | 2019-03-26 |
| 10203247 | Systems for providing illumination in optical metrology | Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more | 2019-02-12 |
| 10197389 | Approaches in first order scatterometry overlay based on introduction of auxiliary electromagnetic fields | Vladimir Levinski, Yuri Paskover, Yuval Lubashevsky | 2019-02-05 |
| 10190979 | Metrology imaging targets having reflection-symmetric pairs of reflection-asymmetric structures | Yuri Paskover, Barry Loevsky, Daria Negri | 2019-01-29 |