Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10340196 | Method and system for selection of metrology targets for use in focus and dose applications | Roie Volkovich, Hiroyuki Kurita | 2019-07-02 |
| 10261014 | Near field metrology | Noam Sapiens, Joel Seligson, Vladimir Levinski, Daniel Kandel, Barak Bringoltz +2 more | 2019-04-16 |
| 10242290 | Method, system, and user interface for metrology target characterization | Inna Tarshish-Shapir, Anat Marchelli, Berta Dinu, Vladimir Levinski, Boris Efraty +4 more | 2019-03-26 |
| 10197922 | Focus metrology and targets which utilize transformations based on aerial images of the targets | Nadav Gutman, Vladimir Levinski, Oded Kaminsky | 2019-02-05 |