Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504802 | Target location in semiconductor manufacturing | Naomi Ittah, Eran Amit, Vincent Immer, Einat Peled | 2019-12-10 |
| 10473460 | Overlay measurements of overlapping target structures based on symmetry of scanning electron beam signals | Eran Amit, Stefan Eyring, Hari Pathangi, Frank Laske, Ulrich Pohlmann +1 more | 2019-11-12 |
| 10474040 | Systems and methods for device-correlated overlay metrology | Frank Laske, Ulrich Pohlmann, Stefan Eyring | 2019-11-12 |
| 10379449 | Identifying process variations during product manufacture | Tzahi Grunzweig, Claire E. Staniunas, Tal Marciano, Nimrod Shuall | 2019-08-13 |
| 10197922 | Focus metrology and targets which utilize transformations based on aerial images of the targets | Yoel Feler, Vladimir Levinski, Oded Kaminsky | 2019-02-05 |