Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10473460 | Overlay measurements of overlapping target structures based on symmetry of scanning electron beam signals | Nadav Gutman, Eran Amit, Stefan Eyring, Hari Pathangi, Ulrich Pohlmann +1 more | 2019-11-12 |
| 10474040 | Systems and methods for device-correlated overlay metrology | Ulrich Pohlmann, Stefan Eyring, Nadav Gutman | 2019-11-12 |
| 10337852 | Method for measuring positions of structures on a substrate and computer program product for determining positions of structures on a substrate | Oliver Ache | 2019-07-02 |
| 10303153 | Method and computer program product for controlling the positioning of patterns on a substrate in a manufacturing process | Slawomir Czerkas | 2019-05-28 |
| 10185800 | Apparatus and method for the measurement of pattern placement and size of pattern and computer program therefor | Stefan Eyring | 2019-01-22 |