Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10473460 | Overlay measurements of overlapping target structures based on symmetry of scanning electron beam signals | Nadav Gutman, Eran Amit, Hari Pathangi, Frank Laske, Ulrich Pohlmann +1 more | 2019-11-12 |
| 10474040 | Systems and methods for device-correlated overlay metrology | Frank Laske, Ulrich Pohlmann, Nadav Gutman | 2019-11-12 |
| 10185800 | Apparatus and method for the measurement of pattern placement and size of pattern and computer program therefor | Frank Laske | 2019-01-22 |