Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10458777 | Polarization measurements of metrology targets and corresponding target designs | Eran Amit, Barry Loevsky, Andrew V. Hill, Amnon Manassen, Nuriel Amir +1 more | 2019-10-29 |
| 10401841 | Identifying registration errors of DSA lines | Eran Amit, Raviv Yohanan | 2019-09-03 |
| 10340196 | Method and system for selection of metrology targets for use in focus and dose applications | Hiroyuki Kurita, Yoel Feler | 2019-07-02 |
| 10331050 | Lithography systems with integrated metrology tools having enhanced functionalities | Eran Amit, Liran Yerushalmi | 2019-06-25 |
| 10303835 | Method and apparatus for direct self assembly in target design and production | Eran Amit, Raviv Yohanan, Tal Itzkovich, Nuriel Amir, DongSub Choi | 2019-05-28 |