Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10401841 | Identifying registration errors of DSA lines | Roie Volkovich, Eran Amit | 2019-09-03 |
| 10303835 | Method and apparatus for direct self assembly in target design and production | Eran Amit, Tal Itzkovich, Nuriel Amir, Roie Volkovich, DongSub Choi | 2019-05-28 |
| 10274837 | Metrology target for combined imaging and scatterometry metrology | Eran Amit | 2019-04-30 |