Issued Patents 2019
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10458777 | Polarization measurements of metrology targets and corresponding target designs | Eran Amit, Barry Loevsky, Amnon Manassen, Nuriel Amir, Vladimir Levinski +1 more | 2019-10-29 |
| 10444161 | Systems and methods for metrology with layer-specific illumination spectra | Amnon Manassen, Daria Negri, Ohad Bachar, Vladimir Levinski, Yuri Paskover | 2019-10-15 |
| 10422508 | System and method for spectral tuning of broadband light sources | Amnon Manassen, Ohad Bachar | 2019-09-24 |
| 10401738 | Overlay metrology using multiple parameter configurations | Andrei V. Shchegrov, Amnon Manassen, Noam Sapiens | 2019-09-03 |
| 10401228 | Simultaneous capturing of overlay signals from multiple targets | Amnon Manassen, Yuri Paskover, Yuval Lubashevsky | 2019-09-03 |
| 10371626 | System and method for generating multi-channel tunable illumination from a broadband source | Amnon Manassen, Ohad Bachar | 2019-08-06 |
| 10209183 | Scatterometry system and method for generating non-overlapping and non-truncated diffraction images | Tzahi Grunzweig, Barry Loevsky | 2019-02-19 |
| 10203247 | Systems for providing illumination in optical metrology | Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more | 2019-02-12 |