AS

Anatoly Shchemelinin

KL Kla-Tencor: 7 patents #13 of 446Top 3%
📍 Bozeman, MT: #5 of 126 inventorsTop 4%
🗺 Montana: #8 of 356 inventorsTop 3%
Overall (2019): #19,862 of 560,194Top 4%
7
Patents 2019

Issued Patents 2019

Showing 1–7 of 7 patents

Patent #TitleCo-InventorsDate
10520741 System and method for separation of pump light and collected light in a laser pumped light source Ilya Bezel, Matthew Panzer, Eugene Shifrin 2019-12-31
10381216 Continuous-wave laser-sustained plasma illumination source Ilya Bezel, Eugene Shifrin, Matthew Panzer 2019-08-13
10283342 Laser sustained plasma light source with graded absorption features Ilya Bezel, Kenneth P. Gross, Matthew Panzer, Anant Chimmalgi, Lauren Wilson +1 more 2019-05-07
10257918 System and method for laser-sustained plasma illumination Anant Chimmalgi, Sebaek Oh, Joshua Wittenberg, Lauren Wilson, Rahul Yadav +2 more 2019-04-09
10244613 System and method for electrodeless plasma ignition in laser-sustained plasma light source Anant Chimmalgi, Rudolf Brunner, Ilya Bezel, Erik Kim, Rajeev Patil 2019-03-26
10217625 Continuous-wave laser-sustained plasma illumination source Ilya Bezel, Eugene Shifrin, Matthew Panzer 2019-02-26
10203247 Systems for providing illumination in optical metrology Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Ilya Bezel +16 more 2019-02-12