Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10520832 | Topographic phase control for overlay measurement | Vladimir Levinski, Amnon Manassen, Yoni Shalibo | 2019-12-31 |
| 10444161 | Systems and methods for metrology with layer-specific illumination spectra | Amnon Manassen, Daria Negri, Andrew V. Hill, Ohad Bachar, Vladimir Levinski | 2019-10-15 |
| 10408602 | Quality estimation and improvement of imaging metrology targets | Boris Efraty | 2019-09-10 |
| 10401228 | Simultaneous capturing of overlay signals from multiple targets | Andrew V. Hill, Amnon Manassen, Yuval Lubashevsky | 2019-09-03 |
| 10197389 | Approaches in first order scatterometry overlay based on introduction of auxiliary electromagnetic fields | Vladimir Levinski, Yuval Lubashevsky, Amnon Manassen | 2019-02-05 |
| 10190979 | Metrology imaging targets having reflection-symmetric pairs of reflection-asymmetric structures | Amnon Manassen, Barry Loevsky, Daria Negri | 2019-01-29 |