Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10401228 | Simultaneous capturing of overlay signals from multiple targets | Andrew V. Hill, Amnon Manassen, Yuri Paskover | 2019-09-03 |
| 10197389 | Approaches in first order scatterometry overlay based on introduction of auxiliary electromagnetic fields | Vladimir Levinski, Yuri Paskover, Amnon Manassen | 2019-02-05 |