Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10444161 | Systems and methods for metrology with layer-specific illumination spectra | Amnon Manassen, Daria Negri, Andrew V. Hill, Vladimir Levinski, Yuri Paskover | 2019-10-15 |
| 10422508 | System and method for spectral tuning of broadband light sources | Andrew V. Hill, Amnon Manassen | 2019-09-24 |
| 10371626 | System and method for generating multi-channel tunable illumination from a broadband source | Andrew V. Hill, Amnon Manassen | 2019-08-06 |
| 10203247 | Systems for providing illumination in optical metrology | Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more | 2019-02-12 |