Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10401738 | Overlay metrology using multiple parameter configurations | Andrew V. Hill, Andrei V. Shchegrov, Amnon Manassen | 2019-09-03 |
| 10365211 | Systems and methods for metrology beam stabilization | Barry Blasenheim, Michael Friedmann | 2019-07-30 |
| 10274425 | Structured illumination for contrast enhancement in overlay metrology | Joel Seligson, Daniel Kandel | 2019-04-30 |
| 10261014 | Near field metrology | Joel Seligson, Vladimir Levinski, Daniel Kandel, Yoel Feler, Barak Bringoltz +2 more | 2019-04-16 |
| 10234271 | Method and system for spectroscopic beam profile metrology including a detection of collected light according to wavelength along a third dimension of a hyperspectral detector | Jiyou Fu, Kevin Peterlinz, Stilian Ivanov Pandev | 2019-03-19 |