Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438825 | Spectral reflectometry for in-situ process monitoring and control | Prateek Jain, Daniel Wack, Andrei V. Shchegrov, Shankar Krishnan | 2019-10-08 |
| 10234271 | Method and system for spectroscopic beam profile metrology including a detection of collected light according to wavelength along a third dimension of a hyperspectral detector | Jiyou Fu, Noam Sapiens, Stilian Ivanov Pandev | 2019-03-19 |
| 10215688 | Optical metrology tool equipped with modulated illumination sources | Andrei V. Shchegrov, Lawrence D. Rotter, David Y. Wang, Andrei Veldman, Gregory Brady +1 more | 2019-02-26 |