Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10215688 | Optical metrology tool equipped with modulated illumination sources | Andrei V. Shchegrov, Lawrence D. Rotter, David Y. Wang, Kevin Peterlinz, Gregory Brady +1 more | 2019-02-26 |
| 10185303 | Optimizing computational efficiency by multiple truncation of spatial harmonics | — | 2019-01-22 |