Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10234271 | Method and system for spectroscopic beam profile metrology including a detection of collected light according to wavelength along a third dimension of a hyperspectral detector | Noam Sapiens, Kevin Peterlinz, Stilian Ivanov Pandev | 2019-03-19 |