Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438825 | Spectral reflectometry for in-situ process monitoring and control | Prateek Jain, Kevin Peterlinz, Andrei V. Shchegrov, Shankar Krishnan | 2019-10-08 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438825 | Spectral reflectometry for in-situ process monitoring and control | Prateek Jain, Kevin Peterlinz, Andrei V. Shchegrov, Shankar Krishnan | 2019-10-08 |