Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10274425 | Structured illumination for contrast enhancement in overlay metrology | Joel Seligson, Noam Sapiens | 2019-04-30 |
| 10261014 | Near field metrology | Noam Sapiens, Joel Seligson, Vladimir Levinski, Yoel Feler, Barak Bringoltz +2 more | 2019-04-16 |
| 10234280 | Reflection symmetric scatterometry overlay targets and methods | Barak Bringoltz | 2019-03-19 |
| 10228320 | Achieving a small pattern placement error in metrology targets | Vladimir Levinski | 2019-03-12 |
| 10203247 | Systems for providing illumination in optical metrology | Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more | 2019-02-12 |