Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10444639 | Layer-to-layer feedforward overlay control with alignment corrections | Onur N. Demirer, Mark D. Smith, Jeremy Nabeth, Miguel Garcia-Medina, Lipkong Yap | 2019-10-15 |
| 10409171 | Overlay control with non-zero offset prediction | Michael Adel, Amnon Manassen, Ady Levy, Pradeep Subrahmanyan, Liran Yerushalmi +4 more | 2019-09-10 |
| 10340165 | Systems and methods for automated multi-zone detection and modeling | Jeremy Nabeth, Onur N. Demirer, Ramkumar Karur-Shanmugam, Choon (George) Hoong Hoo, Christian Sparka +4 more | 2019-07-02 |