Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10444639 | Layer-to-layer feedforward overlay control with alignment corrections | Onur N. Demirer, William Pierson, Mark D. Smith, Jeremy Nabeth, Miguel Garcia-Medina | 2019-10-15 |