Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10444639 | Layer-to-layer feedforward overlay control with alignment corrections | Onur N. Demirer, William Pierson, Mark D. Smith, Miguel Garcia-Medina, Lipkong Yap | 2019-10-15 |
| 10340165 | Systems and methods for automated multi-zone detection and modeling | Onur N. Demirer, Ramkumar Karur-Shanmugam, Choon (George) Hoong Hoo, Christian Sparka, Hoyoung Heo +4 more | 2019-07-02 |