| 9846130 |
Ceramic ring test device |
Satoru Kobayashi, Yufei Zhu, Saurabh Garg, Soonam Park |
2017-12-19 |
| 9837249 |
Radial waveguide systems and methods for post-match control of microwaves |
Satoru Kobayashi, Soonam Park, Hideo Sugai |
2017-12-05 |
| 9773648 |
Dual discharge modes operation for remote plasma |
Tae Seung Cho, Yi-Heng Sen, Soonam Park |
2017-09-26 |
| 9741593 |
Thermal management systems and methods for wafer processing systems |
David Benjaminson |
2017-08-22 |
| 9728437 |
High temperature chuck for plasma processing systems |
Toan Q. Tran, Sultan Malik, Shambhu N. Roy, Satoru Kobayashi, Tae Seung Cho +2 more |
2017-08-08 |
| 9725302 |
Wafer processing equipment having exposable sensing layers |
Leonard Tedeschi, Lili Ji, Olivier Joubert, Philip Allan Kraus, Daniel T. McCormick |
2017-08-08 |
| 9704723 |
Processing systems and methods for halide scavenging |
Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more |
2017-07-11 |
| 9691645 |
Bolted wafer chuck thermal management systems and methods for wafer processing systems |
David Benjaminson, Ananda Seelavanth Math, Saravanakumar Natarajan, Shubham Chourey |
2017-06-27 |
| 9681497 |
Multi zone heating and cooling ESC for plasma process chamber |
Roy C. Nangoy |
2017-06-13 |
| 9666414 |
Process chamber for etching low k and other dielectric films |
Srinivas D. Nemani, Ellie Yieh, Sergey G. Belostotskiy |
2017-05-30 |
| 9659753 |
Grooved insulator to reduce leakage current |
Tae Seung Cho, Sang Won Kang, Dongqing Yang, Raymond W. Lu, Peter M. Hillman +3 more |
2017-05-23 |
| 9659803 |
Electrostatic chuck with concentric cooling base |
Kyle Tantiwong, Samer Banna |
2017-05-23 |
| 9659792 |
Processing systems and methods for halide scavenging |
Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more |
2017-05-23 |
| 9646807 |
Sealing groove methods for semiconductor equipment |
Qiwei Liang |
2017-05-09 |
| 9610591 |
Showerhead having a detachable gas distribution plate |
Vladimir Knyazik, Hamid Noorbakhsh, Jason C. Della Rosa, Zheng John Ye, Jennifer Y. Sun +1 more |
2017-04-04 |
| 9604249 |
Innovative top-coat approach for advanced device on-wafer particle performance |
Jennifer Y. Sun, Biraja P. Kanungo, Vahid Fioruzdor |
2017-03-28 |
| 9607856 |
Selective titanium nitride removal |
Xikun Wang, Anchuan Wang, Nitin K. Ingle |
2017-03-28 |
| 9593421 |
Particle generation suppressor by DC bias modulation |
Jonghoon Baek, Soonam Park, Xinglong Chen |
2017-03-14 |
| 9564296 |
Radial waveguide systems and methods for post-match control of microwaves |
Satoru Kobayashi, Soonam Park, Hideo Sugai |
2017-02-07 |
